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Mixed Gases
Gas Comp Amount1
5.0000000 25.0000000
Gas Comp 1
NITROGEN HELIUM 3 PPM NITROGEN PPM CHLORINE

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CGA Connection
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Gas Component 1
PPM NITRIC OXIDE (4)

% ARGON (3)

PPM CARBON MONOXIDE (3)

PPM NITROGEN DIOXIDE (2)

PPM SULFUR DIOXIDE (2)

% PROPYLENE (1)

% SEVOFLURANE (1)

% SULFUR HEXAFLUORIDE (1)

PPM AMMONIA (1)

PPM HYDROGEN CHLORIDE (1)

PPM PHOSPHINE (1)